Segmented pallet for disk-shaped substrate electrical biassing and apparatus comprising same

An apparatus for performing a plurality of treatments of at least one surface of each of a plurality of disk-shaped workpieces/substrates, comprising:

• (a) a plurality of linearly spaced-apart treatment stations for performing a corresponding plurality of treatments of said at least one surface of each of said disk-shaped workpieces/substrates;
• (b) a pallet adapted for mounting said plurality of disk-shaped workpieces/substrates, said pallet comprising a plurality of electrically conductive segments arranged in an array, each of said segments:
• i. being electrically insulated from other segments;
• ii. and used to mount thereon and expose at least one major surface of a plurality of disk-shaped workpieces/substrates for receipt of a plurality of treatments;
• and
• iii. including an electrical contact means for providing electrical contact with a bias potential source of said apparatus;
• (c) a plurality of bias potential sources;
• and
• (d) means for transporting said pallet past said plurality of treatment stations,
• wherein each of said segments comprises an electrically conductive sheet, each of said sheets including a plurality of spaced-apart regions each comprising an aperture extending through a respective sheet adapted for mounting said disk-shaped workpieces/substrates therein and exposing oppositely facing pairs of major surfaces of respective disk-shaped workpieces/substrates.