Method of making a thin-film magnetic head having a magnetoresistive device

A method of making a magnetoresistive device assembly equipped with a plurality of magnetoresistive devices, said method comprising the steps of:

• forming, on a substrate to be formed with a plurality of magnetoresistive devices at respective forming positions, a magnetoresistive film so as to connect said plurality of forming positions to each other electrically;
• coating one side of said magnetoresistive film with an electron beam resist;
• forming a resist film having a desirable pattern by irradiating said electron beam resist with an electron beam after bringing an electrically conductive member into contact with said magnetoresistive film;
• and
• forming said magnetoresistive film into a desirable pattern by using said resist film as a mask.

A method of making a head slider equipped with a thin-film magnetic head having a magnetoresistive device, said method comprising, at least, the steps of:

• forming, on a substrate to be formed with a plurality of magnetoresistive devices at respective forming positions, a magnetoresistive film so as to connect said plurality of forming positions to each other electrically;
• coating one side of said magnetoresistive film with an electron beam resist;
• forming a resist film having a desirable pattern by irradiating said electron beam resist with an electron beam after bringing an electrically conductive member into contact with said magnetoresistive film;
• and
• forming said magnetoresistive film into a desirable pattern by using said resist film as a mask;
• so as to prepare a plurality of magnetoresistive devices on said substrate;
• and then
• cutting said substrate so as to form said head slider.

A method of making a head gimbal assembly equipped with a thin-film magnetic head having a magnetoresistive device, said method comprising, at least, the steps of:

• forming, on a substrate to be formed with a plurality of magnetoresistive devices at respective forming positions, a magnetoresistive film so as to connect said plurality of forming positions to each other electrically;
• coating one side of said magnetoresistive film with an electron beam resist;
• forming a resist film having a desirable pattern by irradiating said electron beam resist with an electron beam after bringing an electrically conductive member into contact with said magnetoresistive film;
• and
• forming said magnetoresistive film into a desirable pattern by using said resist film as a mask;
• so as to prepare a plurality of magnetoresistive devices on said substrate;
• and
• the steps of:
• cutting said substrate so as to yield a plurality of magnetic head sliders each having a thin-film magnetic head;
• and
• mounting said magnetic head sliders with gimbals.

A method of making a thin-film magnetic head having a magnetoresistive device, said method comprising the steps of:

• forming a plurality of magnetoresistive devices on a substrate;
• and
• forming a plurality of processing monitor devices having an ohmic value related to an MR height of said magnetoresistive devices;
• said step of forming processing monitor devices including substeps of:
• forming a resistive film to become said processing monitor devices so as to electrically connect said plurality of forming positions to be formed with said processing monitor devices;
• coating one side of said magnetoresistive film with an electron beam resist;
• forming a resist film having a desirable pattern by irradiating said electron beam resist with an electron beam after bringing an electrically conductive member into contact with said resistive film;
• and
• forming said processing monitor devices by turning said resistive film into a desirable pattern while using said resist film as a mask.

A method of making a thin-film magnetic head having an inductive magnetic converting device for recording, said method comprising the steps of:

• forming on a substrate a plurality of first magnetic poles and second magnetic poles magnetically connected to said first magnetic poles while holding at least a recording gap layer between said first and second magnetic poles;
• said step of forming second magnetic poles including the substeps of:
• forming a magnetic film to become said second magnetic poles so as to electrically connect a plurality of forming positions to be formed with said second magnetic poles;
• coating one side of said magnetoresistive film with an electron beam resist;
• forming a resist film having a desirable pattern by irradiating said electron beam resist with an electron beam after bringing an electrically conductive member into contact with said magnetic film;
• and
• forming said magnetic film into said second magnetic poles by using said resist film as a mask.

A method of making a thin-film magnetic head having an inductive magnetic converting device for recording, said method comprising the steps of:

• forming on a substrate a plurality of first magnetic poles and second magnetic poles magnetically connected to said first magnetic poles while holding at least a recording gap layer between said first and second magnetic poles;
• said step of forming second magnetic poles including the substeps of:
• forming a plating electrode so as to electrically connect a plurality of forming positions to be formed with said second magnetic poles;
• coating one side of said plating electrode with an electron beam resist;
• forming a resist film having a desirable pattern by irradiating said electron beam resist with an electron beam after bringing an electrically conductive member into contact with said plating electrode;
• and
• forming said second magnetic poles having a desirable pattern on said plating electrode by plating while using said resist film as a mask.