Method for manufacturing a head for recording and reading optical data

Abstract

A method of manufacturing a head for recording and reading optical data. The method includes: providing a silicon substrate on which a silicon oxide film and a silicon deposition layer are stacked; etching the bottom of the silicon substrate by a given depth to form an opening; forming an aperture having a given slant angle in the silicon deposition layer located on the opening; etching the portion of the silicon oxide film, exposed through the opening; forming a dielectric layer on the silicon deposition layer including the aperture; removing an exposed portion of the bottom of the silicon deposition layer by a given thickness to expose a portion of the dielectric layer, forming a probe on the exposed portion of the dielectric layer and the silicon deposition layer exposed through the opening; and burying the aperture with a non-linear material.

Dependencies are inferred from the claim text.