Internal member for plasma-treating vessel and method of producing the same
AssigneesTocalo Co., Ltd., Tokyo Electron Limited
InventorsYoshio Harada, Junichi Takeuchi, Tatsuya Hamaguchi, Nobuyuki Nagayama, Kouji Mitsuhashi
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Abstract
It is to propose an internal member for a plasma treating vessel having excellent resistances to chemical corrosion and plasma erosion under an environment containing a halogen gas and an advantageous method of producing the same, which is a member formed by covering a surface of a substrate with a multilayer composite layer consisting of a metal coating formed as an undercoat, Al2O3 film formed on the undercoat as a middle layer and Y2O3 sprayed coating formed on the middle layer as a top coat.
Claims30
An internal member for a plasma treating vessel comprising a substrate and a Y2O3 reduced-pressure plasma sprayed coating covered on a surface thereof.
An internal member for a plasma treating vessel comprising an Al substrate and a Y2O3 sprayed coating covered on a surface thereof, in which the Y2O3 sprayed coating has a porosity of 0.2-10%.
An internal member for a plasma treating vessel comprising a substrate, a Ni-containing undercoat formed on a surface thereof, and a Y2O3 sprayed coating formed on the undercoat as a top coat.
An internal member for a plasma treating vessel comprising a substrate, a Ni alloy-containing undercoat formed on a surface thereof, and a Y2O3 sprayed coating formed on the undercoat as a top coat.
An internal member for a plasma treating vessel comprising a substrate, a W-containing undercoat formed on a surface thereof, and a Y2O3 sprayed coating formed on the undercoat as a top coat.
An internal member for a plasma treating vessel comprising a substrate, a W alloy-containing undercoat formed on a surface thereof, and a Y2O3 sprayed coating formed on the undercoat as a top coat.
An internal member for a plasma treating vessel comprising a substrate, a Ti-containing undercoat formed on a surface thereof, and a Y2O3 sprayed coating formed on the undercoat as a top coat.
An internal member for a plasma treating vessel comprising a substrate, a Ti alloy-containing undercoat formed on a surface thereof, and a Y2O3 sprayed coating formed on the undercoat as a top coat.
An internal member for a plasma treating vessel comprising a substrate, an undercoat formed on a surface thereof through a spraying process, and a Y2O3 sprayed coating formed on the undercoat as a top coat.
A method of producing an internal member for a plasma treating vessel, which comprises covering Y2O3 on a surface of a substrate through a reduced-pressure plasma spraying process to form a Y2O3 reduced-pressure plasma sprayed coating.
A method of producing an internal member for a plasma treating vessel, which comprises forming an undercoat on a surface of a substrate through a spraying process and forming a Y2O3 sprayed coating on the undercoat as a top coat.
An internal member for a plasma treating vessel comprising a substrate, a mixed coating of Al2O3 and Y2O3 formed on a surface thereof, and a Y2O3 sprayed coating formed on the mixed coating.
An internal member for a plasma treating vessel comprising a substrate, an Al2O3 coating formed on a surface of the substrate, and a sprayed coating of Y2O3 formed thereon.
A method of producing an internal member for a plasma treating vessel, which comprises forming a mixed coating of Al2O3 and Y2O3 on a surface of a substrate, and covering Y2O3 on a surface of the mixed coating through a spraying process to form a Y2O3 sprayed coating.
A method of producing an internal member for a plasma treating vessel, which comprises covering and forming an Al2O3 coating on a surface of a substrate, and covering Y2O3 on a surface of the Al2O3 coating through a spraying process to form a Y2O3 sprayed coating.
Dependencies are inferred from the claim text.