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US 6,884,327 B2Granted
Mode size converter for a planar waveguide
OwnerTao Pan, Richard E. Demaray +3inventors
InventorsTao Pan, Richard E. Demaray, Yu Chen, Yong Jin Xie, Rajiv Pethe
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Abstract
A process for forming a mode size converter with an out-of-plane taper formed during deposition with a shadow mask is disclosed. Mode-size converters according to the present invention can have any number of configurations. Measured coupling efficiencies for waveguides with mode size converters according to the present invention show marked improvement.
Claims11
A method of forming a tapered waveguide, comprising:
- depositing a core layer over a substrate with a shadow mask, wherein the substrate is biased;
- and
- patterning the core layer to form a tapered waveguide,
- wherein the core layer is formed of aluminasilicate doped with ytterbium.
1 more element
Dependencies are inferred from the claim text.