Susceptor of apparatus for manufacturing semiconductor device
AssigneeJusung Engineering Co., Ltd.
InventorYong-Jin Kim
Life of this patent
Estimating the term…
Abstract
A susceptor of an apparatus for manufacturing a semiconductor device includes a first part having a first lift pin hole, a second part combined with the first part and forming a space with the first part, wherein the second part has a second lift pin hole corresponding to the first lift pin hole, a heater disposed in the space, wherein the heater has a third lift pin hole corresponding to the first and second lift pin holes, a lift pin tube inserted in the first, second and third lift pin holes, wherein the lift pin tube is combined with the first and second part thereby preventing air from going into the space, and a lift pin passing through the lift pin tube.
Claims16
A susceptor of an apparatus for manufacturing a semiconductor device, comprising:
- a first part having a first lift pin hole;
- a second part combined with the first part and forming a space with the first part, the second part having a second lift pin hole corresponding to the first lift pin hole;
- a heater disposed in the space, the heater having a third lift pin hole corresponding to the first and second lift pin holes;
- a lift pin tube inserted in the first, second and third lift pin holes, the lift pin tube comprising screw threads combined with the first and second part thereby preventing air from going into the space;
- and
- a lift pin passing through the lift pin tube.
The susceptor according to claim according 7, wherein the third lift pin hole has a larger diameter than an outer surface of the lift pin tube.
A susceptor of an apparatus for manufacturing a semiconductor device, comprising:
- a first part having a first lift pin hole;
- a second part combined with the first part and forming a space with the first part, the second part having a second lift pin hole corresponding to the first lift pin hole;
- a heater disposed in the space, the heater having a third lift pin hole corresponding to the first and second lift pin holes;
- a lift pin tube inserted in the first, second and third lift pin holes, wherein the first and second parts combined with the lift pin tube have screw threads thereby preventing air from going into the space;
- and
- a lift pin passing through the lift pin tube.
The susceptor according to claim according 15 wherein the third lift pin hole has a larger diameter than an outer surface of the lift pin tube.
Dependencies are inferred from the claim text.