Method of cleaning a probe
AssigneeNihon Microcoating Co., Ltd.
InventorsSatoru Sato, Akihiro Sakamoto
Life of this patent
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Abstract
A cleaning sheet has a base sheet, a first polishing layer formed on the base sheet, a porous foamed layer having air bubbles inside formed on the base sheet, and a second polishing layer formed on the foamed layer. The surface of the foamed layer may be flat or preferably porous with the second polishing layer having openings corresponding to those on the porous surface of the foamed layer. For cleaning a probe by using such a cleaning sheet, the tip of the probe is caused to penetrate the surface of the second polishing layer, to pass through the foamed layer and to be pressed against the first polishing layer.
Claims4
A method of cleaning a tip and side surfaces of a probe, said method comprising the steps of:
- preparing a cleaning sheet comprising a base sheet, a first polishing layer formed on said base sheet, a porous foamed layer formed on said first polishing layer, said porous foamed layer having air bubbles inside, and a second polishing layer formed on said porous foamed layer;
- causing said tip of said probe to penetrate a surface of said second polishing layer;
- causing said tip to pass through said porous foamed layer;
- and pressing said tip against said first polishing layer wherein the side surfaces of said probe are cleaned while said tip of said probe is penetrating said second polishing layer and passes through the foamed layer.
Dependencies are inferred from the claim text.