Compact scroll pump
AssigneeVarian, Inc.
InventorsAnthony G. Liepert, Jeffrey C. Warren, Robert M. Curry, Jr.
Life of this patent
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AssigneeVarian, Inc.
InventorsAnthony G. Liepert, Jeffrey C. Warren, Robert M. Curry, Jr.
Estimating the term…
A compact scroll pump includes a scroll set having an inlet and an outlet, and a drive mechanism. The scroll set includes a stationary scroll blade extending from a stationary plate and an orbiting scroll blade extending from an orbiting plate. The stationary and orbiting scroll blades are intermeshed together to define one or more interblade pockets. The orbiting scroll blade is located on a first side of the orbiting plate, and the drive mechanism is operatively coupled to a second side of the orbiting plate for producing orbiting motion of the orbiting scroll blade relative to the stationary scroll blade. The drive mechanism includes a motor and a crankshaft having an axis of rotation, and an orbiting bearing coupled between the crankshaft and the orbiting plate. The scroll set is configured such that an imaginary plane perpendicular to the axis of rotation passes through the orbiting bearing and at least a portion of the orbiting scroll blade.
Vacuum pumping apparatus comprising:
A compact scroll pump comprising:
Dependencies are inferred from the claim text.