Acceleration sensor and method for manufacturing an acceleration sensor
AssigneeInfineon Technologies AG
InventorsStefan Kolb, Wolfgang Werner
Life of this patent
Estimating the term…
Abstract
An acceleration sensor includes a deflectable pressure measuring diaphragm and a counter-structure, which is deflectable as against the pressure measuring diaphragm. The acceleration sensor includes a detection means for detecting a deflection of the pressure measuring diaphragm as against the counter-structure. Further, a test mass is connected to the pressure measuring diaphragm or the counter-structure in order to be deflected from an idle position depending on an acceleration applied. The deflection of the test mass results in a change of the distance between the pressure measuring diaphragm and the counter-structure, which is detectable by the detection means.
Claims22
An acceleration sensor, comprising:
- a pressure measuring diaphragm;
- a deflectable counter-structure spaced from the pressure measuring diaphragm;
- a test mass connected to the deflectable counter-structure in order to be deflected from an idle position depending on the acceleration applied, a deflection of the test mass leading to a change of a distance between the pressure measuring diaphragm and the deflectable counter-structure;
- and
- a detection means for detecting the distance or the change of the distance between the pressure measuring diaphragm and the deflectable counter-structure.
A method for manufacturing an acceleration sensor from a pressure sensor structure with a pressure measuring diaphragm and a deflectable counter-structure, comprising the following steps:
- producing a test mass connected to the deflectable counter-structure, in order to be deflected from an idle position depending on an acceleration applied, a deflection of the test mass resulting in a change of a distance between the pressure measuring diaphragm and the deflectable counter-structure;
- and
- providing a detection means for detecting the distance or the change of the distance of the pressure measuring diaphragm as against the deflectable counter-structure.
An acceleration sensor, comprising:
- a diaphragm;
- a counter-structure spaced apart from the diaphragm;
- an elastic test mass including an elastic material and solid matter particles, the solid matter particles having a material different from the elastic material and being distributed within the elastic material, the test mass being connected to the diaphragm, in order to be deflected with respect to the counter-structure depending on the acceleration applied, a deflection of the test mass resulting in a change in distance between the diaphragm and the counter-structure;
- and
- a detection means for detecting the change or the change of the distance between the diaphragm and the counter-structure.
Dependencies are inferred from the claim text.