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US 6,883,380 B2Granted
Pressure sensor capsule
OwnerMark G. Romoinventor
Life of this patent
Estimating the term…
Abstract
A pressure sensing capsule includes a pressure sensor inside a capsule wall. The capsule wall includes a feedthrough opening. The pressure sensor is mounted to a stress isolation member with a feedthrough hole. The pressure sensor is mounted to the stress isolation member with the feedthrough hole overlying electrical contacts on the pressure sensor.
Claims34
A capsule couplable to a fluid isolator, comprising:
- a capsule wall having a fluid inlet couplable to the fluid isolator, a feedthrough opening and an internal sealing surface surrounding the feedthrough opening;
- isolator fluid contained by the capsule wall and coupling pressure from the fluid isolator;
- a pressure sensor within the capsule wall, the pressure sensor including a diaphragm layer, electrical contacts and a sensor element that are disposed on the diaphragm layer, and circuit traces disposed on the diaphragm layer that are coupled between the electrical contacts and the sensor element;
- and
- a stress isolation member having a feedthrough hole overlying the electrical contacts and having a first member surface bonded to the pressure sensor and a second member surface bonded to the sealing surface, the stress isolation member providing mechanical mounting of the pressure sensor and electrical feedthrough of the electrical contacts.
2 more elements
A pressure sensor capsule, comprising:
- a capsule wall having a fluid inlet, a feedthrough opening and an internal sealing surface surrounding the feedthrough opening;
- an inlet member coupling pressure to the fluid inlet;
- a pressure sensor within the capsule wall, the pressure sensor including a diaphragm layer, electrical contacts and a sensor element that are disposed on the diaphragm layer, and circuit traces disposed on the diaphragm layer that are coupled between the electrical contacts and the sensor element;
- and
- a stress isolation member having a feedthrough hole overlying the electrical contacts and having a first member surface bonded to the pressure sensor and a second member surface bonded to the sealing surface, the stress isolation member providing mechanical mounting of the pressure sensor and electrical feedthrough of the electrical contacts.
2 more elements
Dependencies are inferred from the claim text.