Low TCE fill fluid for barrier diaphragm pressure sensors
AssigneeHoneywell International Inc.
InventorThomas G. Stratton
Life of this patent
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Abstract
A pressure sensor has a housing with an opening exposing a cavity, a barrier diaphragm across the opening, a pressure sensing element within the cavity, and a fill fluid within the cavity. The fill fluid comprises a fluid and a filler, the fluid has a TCE associated therewith, the housing has a TCE associated therewith, and the filler lowers the TCE of the fluid to a level matching the TCE of the housing. Accordingly, the housing and the fill fluid do not exhibit temperature induced dimensional changes relative to one another that cause plastic deformation of the barrier diaphragm.
Claims43
A pressure sensor comprising:
- a housing having an opening exposing a cavity;
- a barrier diaphragm across the opening;
- a pressure sensing element supported within the cavity;
- and,
- a fill fluid within the cavity, wherein the fill fluid comprises a fluid mixed with a filler, wherein the fluid has a TCE, and wherein the filler is selected to lower the TCE of the fill fluid.
A pressure sensor comprising:
- a housing having a cavity;
- a barrier diaphragm in communication with the cavity;
- a pressure sensing element within the cavity;
- and,
- a fill fluid within the cavity, wherein the fill fluid comprises a fluid and a filler, wherein the fluid has a TCE associated therewith, wherein the housing has a TCE associated therewith, and wherein the filler lowers the TCE of the fill fluid to a level more closely matching the TCE of the housing.
A pressure sensor comprising:
- a housing having an opening exposing a cavity;
- a pressure sensing element supported by the housing within the cavity;
- a diaphragm stop within the cavity, wherein the pressure sensing element is between the diaphragm stop and the housing;
- a barrier diaphragm across the opening, wherein the diaphragm stop is between the pressure sensing element and the barrier diaphragm;
- electrical conductors extending through the housing and electrically engaging the pressure sensing element;
- and,
- a fill fluid within the cavity, wherein the fill fluid has a TCE, wherein the housing has a TCE, and wherein the TCE of the fill fluid has a value relative to the TCE of the housing so as to prevent plastic deformation of the barrier diaphragm.
Dependencies are inferred from the claim text.