Semitransparent optical detector including a polycrystalline layer and method of making
AssigneeAegis Semiconductor, Inc.
InventorsSigurd Wagner, Matthias Wagner, Eugene Y. Ma, Adam M. Payne
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AssigneeAegis Semiconductor, Inc.
InventorsSigurd Wagner, Matthias Wagner, Eugene Y. Ma, Adam M. Payne
Estimating the term…
Materials suitable for fabricating optical monitors include amorphous, polycrystalline and microcrystalline materials. Semitransparent photodetector materials may be based on silicon or silicon and germanium alloys. Conductors for connecting to and contacting the photodetector may be made from various transparent oxides, including zinc oxide, tin oxide and indium tin oxide. Optical monitor structures based on PIN diodes take advantage of the materials disclosed. Various contact, lineout, substrate and interconnect structures optimize the monitors for integration with various light sources, including vertical cavity surface emitting laser (VCSEL) arrays. Complete integrated structures include a light source, optical monitor and either a package or waveguide into which light is directed.
A semitransparent optical detector comprising:
A semitransparent optical detector comprising:
A semitransparent optical detector comprising:
A semitransparent optical detector comprising:
A small aperture semitransparent optical detector comprising:
Dependencies are inferred from the claim text.