Thin film device transfer method, thin film device, thin film integrated circuit device, active matrix board, liquid crystal display, and electronic apparatus

A method for making a circuit, comprising:

• a first step of forming a first separation layer on a substrate;
• a second step of forming an object-of-transfer layer including a device on said first separation layer;
• a third step of forming a second separation layer on said object-of-transfer layer;
• a fourth step of attaching a primary destination-of-transfer part to said second separation layer;
• a fifth step of causing exfoliation in an inner-layer and/or interface of said first separation layer, and then removing said substrate from said object-of-transfer layer while retaining at least part of said first separation layer on said object-of-transfer layer;
• a sixth step of removing said first separation layer from said object-of-transfer layer;
• a seventh step of attaching a secondary destination-of-transfer part which is larger than said substrate to the bottom of said object-of-transfer layer;
• and
• an eighth step of removing said primary destination-of-transfer part and said second separation layer from said object-of-transfer layer,
• wherein a plurality of said object-of-transfer layers are transferred to said secondary destination-of-transfer part by repeating said first to eighth steps a plural number of times, and
• wherein said circuit includes said plurality of object-of-transfer layers each including the device.

A method for making an active matrix substrate, comprising:

• a first step of forming a first separation layer on a substrate;
• a second step of forming an object-of-transfer layer including a device above a substrate on said first separation layer;
• a third step of forming a second separation layer on said object-of-transfer layer;
• a fourth step of attaching a primary destination-of-transfer part to said separation layer;
• a fifth step of causing exfoliation in an inner-layer and/or interface of said first separation layer, and then removing said substrate from said object-of-transfer layer while retaining at least a part of said first separation layer on said object-of-transfer layer;
• a sixth step of removing said first separation layer from said object-of-transfer layer;
• a seventh step of attaching a secondary destination-of-transfer part to the bottom of said object-of-transfer layer;
• and
• an eighth step of removing said primary destination-of-transfer part and said second separation layer from said object-of-transfer layer,
• wherein said active matrix substrate includes said object-of-transfer layer including the device transferred to said secondary destination-of-transfer part.

A method for making an active matrix substrate, comprising:

• a first step of forming a first separation layer on a substrate;
• a second step of forming an object-of-transfer layer including a device above a substrate on said first separation layer;
• a third step of forming a second separation layer on said object-of-transfer layer;
• a fourth step of attaching a primary destination-of-transfer part to said separation layer;
• a fifth step of causing exfoliation in an inner-layer and/or interface of said first separation layer, and then removing said substrate from said object-of-transfer layer while retaining at least a part of said first separation layer on said object-of-transfer layer;
• a sixth step of removing said first separation layer from said object-of-transfer layer;
• a seventh step of attaching a secondary destination-of-transfer part to the bottom of said object-of-transfer layer;
• and
• an eighth step of removing said primary destination-of-transfer part and said second separation layer from said object-of-transfer layer,
• wherein a plurality of said object-of-transfer layers are transferred to said secondary destination-of-transfer part by repeating said first to eighth steps a plural number of times, and
• wherein said active matrix substrate includes said plurality of object-of-transfer layers each including the device.