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US 6,874,367 B2Granted
Pressure sensor
AssigneeSensonor ASA
InventorHenrik Jakobsen
Life of this patent
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Abstract
A capacitive-type pressure sensor comprising a glass plate having an electrode formed thereon. A diaphragm is formed from a semiconductor material and bonded to the glass substrate to define an enclosed cavity containing at least a portion of the electrode, to thereby define a capacitive element, through which, in use, an electrical signal may be passed to determine a capacitance thereof which is indicative of the pressure to be determined.
Claims13
A capacitive-type pressure sensor comprising:
- a glass substrate having an electrode formed thereon;
- a diaphragm formed from a semiconductor material and bonded to the glass substrate to define an enclosed cavity containing at least a portion of the electrode, to thereby define a capacitive element, through which, in use, an electrical signal is passed to determine a capacitance thereof which is indicative of the pressure to be determined;
- wherein press contacts are located external to the cavity to allow for interaction with devices interconnected with the press contacts;
- and
- wherein an electrical connector is provided tbr each of the electrode and the diaphragm, wherein the electrical connector for the electrode is provided by doped conductors being formed within the semiconductor material.
2 more elements
Dependencies are inferred from the claim text.