Target and method of optimizing target profile
AssigneeTosoh SMD, Inc.
InventorsEugene Y. Ivanov, David B. Smathers, Charles E. Wickersham, Jr., Lin Zhu
Life of this patent
Estimating the term…
Abstract
A method of constructing increased life sputter targets and targets made by the method are disclosed. The method comprises starting with a precursor target design or profile and making magnetic field strength measurements along the radial surface of same and at a plurality of vertical dimensions above the surface. An optimal magnetic field strength ratio is provided between the erosion tracks of the target. The vertical dimension of the material to be added to one of the erosion tracks is determined and then the height of the other erosion track is calculated by utilizing this optimal magnetic field strength ratio.
Claims19
A method of determining a desired thickness of plural erosion tracks in a magnetron sputtering target comprising:
- a) providing a desired precursor sputtering target configuration having a specified sputtering surface and determining the location of said erosion tracks, E-1 and E-2, thereon;
- b) determining the magnetic field strength at different radial locations RL along the sputtering surface of said precursor sputtering target configuration and determining a time averaged magnetic field strength for points on said erosion tracks, RE-1 and RE-2;
- c) determining an optimum ratio range for said magnetic field strengths RE-1 and RE-2 determined in (b);
- d) determining magnetic field strengths at vertical dimensions V above said erosion tracks E1 and E2 such that data points VE1 and VE2 are generated;
- e) recording the magnetic field strengths for said vertical dimensions VE1 and VE2;
- f) determining a desired increase in vertical dimension for sputtering material at one of said erosion tracks E1 or E2;
- and then
- g) determining the desired vertical height for sputtering material to be added to said sputtering surface at said other erosion track.
Sputter target having a sputtering surface with erosion tracks E-1 and E-2 located thereon and having a sputter target thickness of h;
- wherein h>0.772″, said target having a time averaged magnetic field strength of RE-1 for points on said erosion track E-1 and a time averaged magnetic field strength of RE-2 for points on said erosion track E-2 such that RE-1:RE-2 is from about 1.00-about 1.20:1.
Sputter target assembly having a sputtering surface and a backing plate surface opposed from said sputtering surface and adapted for contact with a heat exchange medium, said assembly having a thickness of greater than about 1.9″, said sputtering surface including erosion tracks E-1 and E-2 located thereon, said target having a time averaged magnetic field strength of RE-1 for points on said erosion track E-1 and a time averaged magnetic field strength of RE-2 for points on said erosion track E-2 such that RE-1:RE-2 is from about 1.00-about 1.20:1.
A sputter target comprising a body of generally frusto-conical form including a sputtering surface, said sputtering surface including a thickened annular terrace area surrounding a well, said well having a surface recessed from said terrace by about 0.04-0.075″, wherein said sputtering surface comprises a time averaged magnetic field strength of RE-1 for points on said terrace and a time average magnetic field strength of RE-2 for points of said well such that RE-1:RE-2 is from about 1.00-1.20:1.
Dependencies are inferred from the claim text.