Liquid-phase growth process and liquid-phase growth apparatus
AssigneeCanon Kabushiki Kaisha
InventorsMasaki Mizutani, Katsumi Nakagawa, Tetsuro Saito, Tatsumi Shoji, Takehito Yoshino, Shoji Nishida
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Abstract
A liquid-phase growth process comprising immersing a base substrate in a solution containing reactant species to be grown dissolved therein which is accommodated in a crucible and growing a crystal film on said substrate, characterized in that a capping member is kept afloat on the surface of said solution before said substrate is immersed in said solution and said capping member is subsided in said solution upon immersing said substrate in said solution. A liquid-phase growth apparatus suitable for practicing said liquid-phase growth process.
Claims12
A liquid-phase growth process comprising immersing a base substrate in a solution containing a reactant species to be grown dissolved therein which is accommodated in a crucible and growing a crystal film on said substrate, wherein a capping member is kept afloat on the surface of said solution before said substrate is immersed in said solution and said capping member is subsided in said solution upon immersing said substrate in said solution.
A liquid-phase growth apparatus having a crucible for accommodating a solution containing reactant species dissolved therein and a substrate holder for retaining a base substrate therein and which serves to immerse said substrate in said solution accommodated in said crucible, wherein said substrate is immersed in said solution and a crystal film is grown on said substrate, characterized in that said liquid-phase growth apparatus has a capping member which is kept afloat on the surface of said solution accommodated in said crucible when said substrate is not immersed in said solution and said capping member is subsided in said solution when said substrate is immersed in said solution.
Dependencies are inferred from the claim text.