Microdischarge devices and arrays
AssigneeThe Board of Trustees of the University of Illinois
InventorsJ. Gary Eden, Sung-Jin Park, Clark J. Wagner
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Abstract
A discharge device is described that contains an anode, a cathode, and an insulating layer disposed between the anode and the cathode. A cavity is extends entirely through at least one of the anode or cathode and penetrates the dielectric layer. At least one of the anode or cathode may include a screen or the dielectric layer may have a plurality of films with at least two different dielectric constants. The voltage differences between the anode and cathode in each of multiple devices electrically connected together may be limited.
Claims32
A collection of discharge devices, comprising:
- a plurality of discharge devices, each discharge device comprising:
- a first electrode;
- a second electrode on the first electrode;
- a dielectric layer between the first and second electrodes;
- and
- a cavity that extends through the first electrode and the dielectric layer,
- wherein the plurality of discharge devices are electrically connected together and when a minimum voltage sufficient to cause discharge of at least 10 of the devices in the plurality of discharge devices is applied, then a voltage difference between the first and second electrode at every cavity of the at least 10 devices has a voltage difference of no more than 20% of an average voltage difference between the first and second electrodes of the at least 10 devices.
Dependencies are inferred from the claim text.