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US 6,864,773 B2Granted
Variable field magnet apparatus
AssigneeApplied Materials, Inc.
InventorMark A. Perrin
Life of this patent
Estimating the term…
Abstract
A magnet assembly for producing a varying magnetic field is provided wherein a plurality of permanent magnets are interposed between two members which are constructed of a ferromagnetic material. Each of the magnets is rotatable and has a north and south magnetic pole. Each of the magnets is disposed so that the north magnetic poles of the plurality of permanent magnets have a common magnetic orientation with respect to the first member. An orienter, such as, for example, a ring gear and pinion arrangement, is coupled to the magnets to change their common magnetic orientation with respect to the first member. The magnetic field projected by the assembly varies as a function of the orientation of the magnets.
Claims54
A magnet assembly for producing a varying magnetic field, comprising:
- a plurality of permanent magnets adapted to produce magnetic fields and disposed in a generally closed-loop arrangement, each of the magnets having a magnetic north pole and a magnetic south pole which define a magnetic polar axis wherein the north pole and magnetic polar axis of each magnet define a magnetic orientation of the magnet and wherein the magnetic orientations of the plurality of magnets are positioned in a common magnetic orientation and the magnetic fields produced vary as a function of the common magnetic orientation of the plurality of permanent magnets;
- and
- an orienter mechanically coupled to the plurality of permanent magnets and adapted to change the common magnetic orientation of the magnets from a first common magnetic orientation to a second common magnetic orientation wherein the magnetic fields are varied.
A magnet assembly for producing a varying magnetic field, comprising:
- a first member constructed of a ferromagnetic material;
- a second member constructed of a ferromagnetic material and disposed in a parallel, spaced-apart relationship with the first member;
- and
- a plurality of permanent magnets interposed between the first and second members and rotatively coupled to one of the first and second members to rotate the plurality of permanent magnets at the same angular velocity and in the same rotational direction, each of the plurality of permanent magnets having a north magnetic pole and a south magnetic pole which define a magnetic polar axis and wherein the north magnetic pole and the magnetic polar axis of each permanent magnet define a magnetic orientation of the permanent magnet, the plurality of permanent magnets being disposed so that the magnetic orientations of the plurality of permanent magnets have a common magnetic orientation with respect to the first member, and absent any permanent magnets interposed between the first and second members having a magnetic orientation which is other than the common orientation of the plurality of permanent magnets.
1 more element
A magnet assembly for a plasma reactor having an interior, comprising:
- a plurality of permanent magnets disposed in a generally closed-loop arrangement and adapted to be positioned to project magnetic fields within the interior of the reactor, each of the magnets having a magnetic north pole and a magnetic south pole which define a magnetic polar axis wherein the north pole and magnetic polar axis of each magnet define a magnetic orientation of the magnet and wherein the magnetic orientations of the plurality of magnets are positioned in a common magnetic orientation and the magnetic fields produced vary as a function of the common magnetic orientation of the plurality of permanent magnets;
- and
- an orienter mechanically coupled to the plurality of magnets and adapted to change the common magnetic orientation of the magnets from a first common magnetic orientation to a second common magnetic orientation wherein the magnetic fields projected within the chamber are changed.
A magnet assembly for a plasma reactor having an interior, the magnet assembly comprising:
- a first annular-shaped member having a center axis of rotation and constructed of a ferromagnetic material;
- a second annular-shaped member constructed of a ferromagnetic material and disposed in a parallel, spaced-apart relationship with the first member;
- and
- a plurality of permanent magnets interposed between the first and second members and adapted to be positioned to project magnetic fields within the interior of the reactor, each of the permanent magnets being rotatable about a magnet axis of rotation which is generally perpendicular to the first member center axis of rotation and having a north magnetic pole and a south magnetic pole which define a magnetic polar axis and wherein the north magnetic pole and the magnetic polar axis of each permanent magnet define a magnetic orientation of the permanent magnet, the plurality of permanent magnets being disposed so that the magnetic orientations of the plurality of permanent magnets have a common orientation with respect to the first member.
1 more element
A magnet assembly for a plasma reactor having an interior, comprising:
- a first member constructed of a ferromagnetic material;
- a second member constructed of a ferromagnetic material and disposed in a parallel, spaced-apart relationship with the first member;
- and
- a plurality of permanent magnets interposed between the first and second members and adapted to be positioned to project magnetic fields within the interior of the reactor, the plurality of permanent magnets being rotatively coupled to one of the first and second members to rotate the plurality of permanent magnets at the same angular velocity and in the same rotational direction, each of the permanent magnets having a north magnetic pole and a south magnetic pole which define a magnetic polar axis and wherein the north magnetic pole and the magnetic polar axis of each permanent magnet define a magnetic orientation of the permanent magnet, the plurality of permanent magnets being disposed so that the magnetic orientations of the plurality of permanent magnets have a common orientation with respect to the first member, and absent any permanent magnets interposed between the first and second members having a magnetic orientation which is other than the common orientation of the plurality of permanent magnets.
1 more element
A magnet assembly for a plasma reactor having an interior, comprising:
- a first ring gear constructed of a ferromagnetic material;
- a second ring gear constructed of a ferromagnetic material and disposed in a parallel, spaced-apart relationship with the first ring gear;
- a plurality of pinions interposed between the first and second ring gears and coupled to the first and second ring gears to rotate the plurality of pinions at the same angular velocity and in the same rotational direction, each of the plurality of pinions being rotatable about a pinion axis;
- a plurality of permanent magnetic cylinders having a cylinder axis wherein each of the plurality of cylinders is adapted to be carried by one of the plurality of pinions and to be positioned to project magnetic fields within the interior of the reactor and wherein each of the plurality of cylinders has a north magnetic pole and a south magnetic pole which define a magnetic polar axis, wherein the north magnetic pole and the magnetic polar axis of each permanent magnetic cylinder define a magnetic orientation of the permanent magnetic cylinder, the polar axis being oriented generally parallel to the cylinder axis, the cylinder being disposed so that the pinion axis is generally perpendicular to the cylinder axis;
- the plurality of pinions being disposed so that the magnetic orientations of the plurality of permanent magnetic cylinders have a common orientation with respect to the first ring gear;
- a first annular-shaped frame constructed of a non-ferromagnetic material, the first frame having a U-shaped cross section formed by a first base portion, a first outer flange extending axially away from the first base portion, and a first inner flange extending axially away from the first base portion, the first frame being adapted to mate with the first ring gear so that the first ring gear abuts the first base portion between the first outer flange and first inner flange;
- and
- a second annular-shaped frame constructed of a non-ferromagnetic material, the second frame having a U-shaped cross section formed by a second base portion, a second outer flange extending axially away from the second base portion, and a second inner flange extending axially away from the second base portion, the second frame being adapted to mate with the second ring gear so that the second ring gear abuts the second base portion between the second outer flange and second inner flange.
5 more elements
An apparatus for processing a semiconductor workpiece, comprising:
- a bottom wall;
- a side wall connected to the bottom wall, the bottom and side walls forming a cavity;
- a semiconductor workpiece support disposed in the cavity
- a target disposed in the cavity;
- and
- a magnet assembly disposed adjacent to the target, the assembly comprising:
- a first member constructed of a ferromagnetic material;
- a second member constructed of a ferromagnetic material and disposed in a parallel, spaced-apart relationship with the first member;
- and
- a plurality of permanent magnets interposed between the first and second members and rotatively coupled to one of the first and second members to rotate the plurality of permanent magnets at the same angular velocity and in the same rotational direction, each of the permanent magnets having a north magnetic pole and a south magnetic pole which define a magnetic polar axis and wherein the north magnetic pole and the magnetic polar axis of each permanent magnet define a magnetic orientation of the permanent magnet, the plurality of permanent magnets being disposed so that the magnetic orientations of the plurality of permanent magnets have a common orientation with respect to the first member, and absent any permanent magnets interposed between the first and second members having a magnetic orientation which is other than the common orientation of the plurality of permanent magnets.
7 more elements
A method of depositing material on a semiconductor workpiece using a plasma reactor, the method comprising:
- generating a magnetic field in a plasma reactor chamber using a plurality of permanent magnets interposed between a first member and a second member, the first and second members being constructed of a ferromagnetic material and disposed in a parallel, spaced-apart relationship, each of the permanent magnets having a north magnetic pole and a south magnetic pole which define a magnetic polar axis and wherein the north magnetic pole and the magnetic polar axis of each permanent magnet define a magnetic orientation of the permanent magnet, the plurality of permanent magnets being disposed so that the magnetic orientations of the plurality of permanent magnets have a common orientation with respect to the first member, and absent any permanent magnets interposed between the first and second members having a magnetic orientation which is other than the common orientation of the plurality of permanent magnets;
- rotating the plurality of permanent magnets at the same angular velocity and in the same rotational direction to modify the magnetic field in the chamber by moving one of the first and second members, the one of the first and second members being rotatively coupled to the plurality of permanent magnets;
- placing the semiconductor workpiece in the chamber;
- generating a plasma in the chamber;
- and
- sputtering the material with the plasma in a plasma region to produce sputtered material particles.
3 more elements
A magnet assembly for a plasma reactor having an interior, comprising:
- means for generating a magnetic field in the plasma reactor interior wherein the generating means includes a plurality of permanent magnets interposed between a first annular-shaped member and a second annular-shaped member, the first and second members being constructed of a ferromagnetic material and disposed in a parallel, spaced-apart relationship, each of the permanent magnets having a north magnetic pole and a south magnetic pole which define a magnetic polar axis and wherein the north magnetic pole and the magnetic polar axis of each permanent magnet define a magnetic orientation of the permanent magnet, the plurality of permanent magnets being disposed so that the magnetic orientations of the plurality of permanent magnets have a common orientation with respect to the first member;
- and
- means for rotating the plurality of permanent magnets at the same angular velocity and in the same rotational direction with one of the first and second members to modify the magnetic field in the plasma reactor interior.
An apparatus for using a plasma to process a semiconductor workpiece, comprising:
- a process chamber having a side wall which defines a cavity;
- a target;
- means for holding the workpiece in the cavity;
- means for generating a magnetic field in the cavity wherein the generating means includes a plurality of permanent magnets interposed between a first annular-shaped member and a second annular-shaped member, the first and second members being constructed of a ferromagnetic material and disposed in a parallel, spaced-apart relationship, each of the permanent magnets having a north magnetic pole and a south magnetic pole which define a magnetic polar axis and wherein the north magnetic pole and the magnetic polar axis of each permanent magnet define a magnetic orientation of the permanent magnet, the plurality of permanent magnets being disposed so that the magnetic orientations of the plurality of permanent magnets have a common orientation with respect to the first member;
- and
- means for rotating the plurality of permanent magnets at the same angular velocity and in the same rotational direction with one of the first and second members to modify the magnetic field in the cavity.
3 more elements
Dependencies are inferred from the claim text.