Electrolyte with good planarization capability, high removal rate and smooth surface finish for electrochemically controlled copper CMP

An electrolyte composition for planarizing a substrate, comprising:

• one or more chelating agents;
• one or more corrosion inhibitors comprising one or more polymeric inhibitors;
• one or more pH adjusting agents;
• and
• one or more electrically resistive additives, wherein the pH of the electrolyte composition is between about 3 and about 10.

A method for planarizing a surface of a substrate, comprising polishing the substrate with an electrolyte composition comprising:

• one or more chelating agents;
• one or more corrosion inhibitors comprising an organic compound having azole groups and a polymeric inhibitor;
• and
• one or more pH adjusting agents, wherein the pH of the electrolyte composition is between about 3 and about 10.

A method for planarizing a surface of a substrate, comprising polishing the substrate in an electrolyte composition comprising:

• one or more chelating agents;
• one or more corrosion inhibitors comprising one or more polymeric inhibitors;
• one or more pH adjusting agents;
• and
• one or more electrically resistive additives, wherein the pH of the electrolyte composition is between about 3 and about 10.

An electrolyte composition for planarizing a substrate, comprising:

• one or more chelating agents;
• at least one corrosion inhibitor selected from the group consisting of polyalkylaryl ether phosphate, ammonium nonylphenol ethoxylate sulfate, polyammonium nonylphenol ethoxylate sulfate, sulfates of nonylphenol ethoxylate, phosphates of nonylphenol ethoxylate, potassium derivatives of nonylphenol ethoxylate sulfate, phosphate derivatives of alkylphenol ethoxylate, sulfate derivatives of alkylphenol ethoxylate, phosphate derivatives of alkylether, sulfate derivatives of alkylether, phosphate derivatives of alkyl alkanol amide, sulfate derivatives of alkyl alkanol amide, polyalkoxylated amide, and combinations thereof;
• and
• one or more pH adjusting agents, wherein the pH of the electrolyte composition is between about 3 and about 10.