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US 6,862,495 B2Granted
In-situ randomization and recording of wafer processing order at process tools
AssigneeTexas Instruments Incorporated
InventorsRandolph W. Kahn, Kenneth G. Vickers, Richard L. Guldi, Edward J. Leonard, Yaojian Leng
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Abstract
Wafer order is randomized in-situ by use of a separate wafer staging area and randomly shuffling wafers to and from this staging area to shuffle the processing order of the wafer lot. Positional data is captured for each wafer at both the send and receive ends of the process.
Claims4
A method of wafer processing, comprising the steps of:
- randomizing a wafer lot by transporting individual wafers thereof variously,
- within a processing tool,
- from a processing position to a wafer cassette,
- from a wafer staging area to a wafer cassette,
- or from said processing position to said wafer staging area.
2 more elements
Dependencies are inferred from the claim text.