Double winding twin coil for thin-film head writer

Abstract

An enhanced inductive coil design for use in data storage magnetic disk drives with areal density over 35 Gb/in2, features a double wound twin coil that is able to achieve a yoke length of 15 μm or less by reducing the insulation spacing between the two coils. The coil further presents improved reliability by reducing the possibility of occurrence of electrical shorting. The coil is made by forming two interleafing conductors on the same layer with a demesne process. A tri-level process is implemented in the layout of the first conductor to ensure that the coil width and spacing are uniform and even, in order for the second conductor to be wound therebetween. A conformal dielectric layer of approximately 0.1 to 0.2 μm in thickness is deposited between the two conductors and serves as insulation. The two conductors are formed by a copper seed layer plating process that eliminates potential damage to the conductors during production.

Dependencies are inferred from the claim text.