Microgyroscope tunable for translational acceleration
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorJin-woo Cho
Life of this patent
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Abstract
A microgyroscope tunable against an external translational acceleration includes an oscillating mass floating over a wafer to oscillate in a first direction, a driving electrode for oscillating the oscillating mass, a sensing mass oscillating together with the oscillating mass and concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction, a sensing electrode for sensing a motion of the sensing mass, and a sensing electrode supporting portion for movably securing the sensing electrode so that the sensing electrode can move in the second direction with the sensing mass. A microgyroscope according to the present invention is able to prevent sensing signals due to an external disturbance, such as noise or impulse.
Claims10
A microgyroscope tunable against an external translational acceleration, comprising:
- an oscillating mass floating over a wafer to oscillate in a first direction;
- a driving electrode for oscillating the oscillating mass;
- a sensing mass oscillating together with the oscillating mass and concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction;
- a sensing electrode for sensing a motion of the sensing mass;
- and
- a sensing electrode supporting portion for movably securing the sensing electrode so that the sensing electrode can move in the second direction with the sensing mass.
A microgyroscope tunable against an external translational acceleration, comprising:
- an oscillating mass floating over a wafer to oscillate in a first direction;
- a plurality of first comb units arranged on an external side of the oscillating mass;
- at least one driving electrode unit having a plurality of second comb units arranged between the first comb units at predetermined intervals to oscillate the outer gimbals oscillating mass;
- a sensing mass movably arranged in the oscillating mass to oscillate together with the oscillating mass, while concurrently moving in a second direction, wherein the second direction is perpendicular to the first direction;
- a plurality of third comb units arranged in the second direction in one or more divisions defined in an interior of the sensing mass;
- at least one sensing electrode unit arranged in the divisions of the sensing mass, and having a plurality of electrode comb units that are arranged between the third comb units of the divisions at predetermined intervals;
- and
- a sensing electrode supporting portion for movably securing the sensing electrode unit such that the sensing electrode unit is moved in the second direction with the sensing mass.
Dependencies are inferred from the claim text.