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US 6,860,009 B2Granted
Probe construction using a recess
AssigneeCascade Microtech, Inc.
InventorsReed Gleason, Michael A. Bayne, Kenneth Smith, Timothy Lesher, Martin Koxxy
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Abstract
A method of constructing a probe which includes providing a substrate and creating a first substantially asymmetrical recess within the substrate. A conductive material is located within the recess and a conductive trace is electrically connected with the conductive material. A membrane supports the conductive trace, wherein the conductive material is located between the membrane and the substrate. The substrate is removed from the conductive material.
Claims29
A method of constructing a probe comprising:
- (a) providing a substrate;
- (b) creating a first substantially asymmetrical recess within said substrate;
- (c) locating conductive material within said recess;
- (d) providing a conductive trace electrically connected with said conductive material;
- (e) providing a membrane supporting said conductive trace, wherein said conductive material is located between said membrane and said substrate;
- (f) removing said substrate from said conductive material;
- and
- (g) affixing said membrane supporting said conductive trace which is electrically connected to said conductive material to a support such that said conductive material comes into contact with a device under test when probing.
5 more elements
Dependencies are inferred from the claim text.