Yttria-alumina composite oxide films, laminated bodies having the same, a method for producing the same, and corrosion resistant members and films

An yttria-alumina composite oxide film formed on a substrate containing at least one of alumina and yttria-alumina composite oxide as a main component:

• wherein an intermediary layer is interposed between said substrate and said yttria-alumina composite oxide film, and a ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is not smaller than 0.1 and not larger than 0.9 in said intermediary layer;
• and a ratio (YAG (420)/M) of a peak intensity YAG (420) of a (420) plane of a garnet phase to a maximum peak intensity M of crystal phases other than said garnet phase is 2.5 or more in said yttria-alumina composite oxide film based on an X-ray diffraction measurement.

A method of fabricating an yttria-alumina composite oxide film on a substrate containing at least one of alumina and yttria-alumina composite oxide as a main component:

• wherein an intermediary layer is formed on said substrate, a ratio (Y/A) of a molar ratio Y of yttria to a molar ratio A of alumina is not smaller than 0.1 and not larger than 0.9 in said intermediary layer, and said yttria-alumina composite oxide film is formed by heat-treating a spray deposit on said intermediary layer, and a ratio (YAG (420)/M) of a peak intensity YAG (420) of a (420) plane of a garnet phase to a maximum peak intensity M of crystal phases other than said garnet phase is 2.5 or more in said yttria-alumina composite oxide film based on an X-ray diffraction measurement.