Beam homogenizer, laser irradiation apparatus, semiconductor device, and method of fabricating the semiconductor device
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorKoichiro Tanaka
Life of this patent
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Abstract
An optical system (in FIGS. 1A and 1B) wherein a rectilinear laser beam of homogeneous energy distribution is defined for annealing a non-single crystalline semiconductor film (a surface to-be-irradiated 1108), is constructed of reflectors (1106, 1107 etc.) easily and inexpensively without including lenses of transmission type. The rectilinear laser beam can be defined having a length of at least 600 (mm) which corresponds to the shorter latus of a large-sized substrate for mass production.
Claims18
A beam homogenizer for forming a laser beam elongated in one direction on an irradiated surface, comprising:
- two reflectors for reflecting and splitting said laser beams,
- wherein one of said two reflectors comprises a plurality of convex mirrors, and the other one of said two reflectors comprises a plurality of concave mirrors.
A beam homogenizer for forming a laser beam elongated in one direction on an irradiated surface, comprising:
- two reflectors for reflecting and splitting said laser beam,
- wherein one of said two reflectors comprises a plurality of convex and concave mirrors, and the other one of said two reflectors comprises a plurality of concave mirrors.
A beam homogenizer for forming a laser beam elongated in one direction on an irradiate surface, comprising:
- two reflectors for reflecting and splitting said laser beam
- wherein one of said two reflectors comprises a plurality of concave mirrors, and the other one of said two reflectors comprises a plurality of plane mirrors.
A laser irradiation apparatus for forming a laser beam elongated in one direction on an irradiate surface, comprising:
- a laser oscillator;
- and
- two reflectors for reflecting and splitting said laser beam,
- wherein one of said two reflector comprises a plurality of convex mirrors, and the other one of said two reflectors comprises a plurality of concave mirrors.
A laser irradiation apparatus for forming a laser beam elongated in one direction on an irradiate surface, comprising:
- a laser oscillator;
- and
- two reflectors for reflecting and splitting said laser beam,
- wherein one of said two reflectors comprises a plurality of convex and concave mirrors, and the other one of said two reflectors comprises a plurality of concave mirrors.
A laser irradiation apparatus for forming a laser beam elongated in one direction on an irradiate surface, comprising:
- a laser oscillator;
- a first reflector for reflecting and splitting said laser beam, said first reflector including a plurality of concave mirrors;
- and
- a second reflector for reflecting said laser beam, said second reflector including a plurality of plane mirrors.
Dependencies are inferred from the claim text.