Non linear phase shift calibration for interferometric measurement of multiple surfaces
AssigneePhase Shift Technology, Inc.
InventorShouhong Tang
Life of this patent
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Abstract
A method and apparatus to linearize the phase shifts produced by the wavelength-varying driving mechanism of an interferometer used in phase shift interferometry for the measurement of multiple reflective surfaces first calibrates a sequence of physical values used as the input to the driving mechanism to produce a known linear or a known constant phase shift increment between any two adjacent interferograms. The calibration process, in essence, involves the determination of the sequence of physical values, such as the voltage change with respect to the time, through the process of iteration. This sequence then is used as an input to the phase shift driving mechanism for ongoing operation of the system, thereby compensating for non-linear characteristics of the system.
Claims7
In a wavelength-tuned phase shifting interferometer, a method for producing a constant phase shift speed for data acquisition including the steps of:
- providing a tunable coherent light source in an interferometer;
- placing a single reflective surface at the location of a test piece in the interferometer;
- coupling a phase shift driving mechanism to the light source to control the wavelength of light emitted therefrom;
- supplying a known input to the phase shift driving mechanism to acquire a set of interferograms from the interferometer;
- determining a temporal phase shift speed from the set of interferograms;
- generating a new known input to the phase shift driving mechanism for acquiring another set of interferograms with the temporal phase shift speed, the known input, and the desired phase shift between adjacent interferograms;
- and
- using the input which produced the predetermined desired phase shift obtained from a single reflective surface as a final input for application to the phase shift driving mechanism to produce substantially linear phase shifts of the interferograms produced by the interferometer.
Dependencies are inferred from the claim text.