Optically stimulated electron emission contamination monitor and method

An apparatus for performing quality inspections on a test surface comprising:

• a device for producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines, and directing the selected spectrum line to the test surface;
• circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron current;
• the device comprising an ultraviolet optical radiation source;
• and
• the ultraviolet optical radiation source comprising a plurality of Microhollow Cathode Discharge lamps.

An apparatus for performing quality inspections on a test surface comprising:

• a device for producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines, and directing the selected spectrum line to the test surface;
• circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron current;
• the selecting device comprising filtering device that filters the optical radiation directed to the test surface;
• the filtering device comprising a plurality of filtering sections, each filtering section allowing at least one particular spectrum line to pass therethrough;
• a first one of he plurality of filtering sections allowing only a first spectrum line to pass therethrough, a second one of the filtering sections allowing only a second spectrum line to pass therethrough, and a third one of the plurality of filtering sections allowing only the first and second spectrum lines to pass therethrough;
• and
• the filtering device having a first state that enables only the first one of the filtering sections to filter the optical radiation, a second state that enables only the second one of the filtering section to filter the optical radiation, and a third state that enables only the third filtering section to filter the optical radiation.

An apparatus for performing quality inspections on a test surface comprising:

• a device for producing optical radiation having a plurality of different spectrum lines, selecting a least one of the spectrum lines, and directing selected spectrum line to the test surface;
• circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron current;
• the selecting device comprising a filtering device that filters the optical radiation directed to the test surface;
• the filtering device comprising a plurality of filtering sections, each filtering section allowing at least one particular spectrum line to pass therethrough;
• and
• each of the filtering sections comprising dielectric filter.

An apparatus for performing quality inspections on a test surface comprising:

• means for producing optical radiation having a plurality of different spectrum lines, selecting at least one of the spectrum lines, and directing the selected spectrum line to the test surface;
• a means for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron current;
• and
• the means for indicating a condition of quality being capable of distinguishing between;
• surface contamination;
• surface corrosion;
• and
• different species of contaminants.

An apparatus for performing quality inspections on a test surface based on optically stimulated emission of electrons comprising:

• an optical radiation source for producing optical radiation having a plurality different spectrum lines;
• a selection device for selecting at least one of the spectrum lines and directing the selected spectrum line to the test surface;
• circuitry for detecting a current of photoelectrons emitted from the test surface and generating a signal indicative of the detected photoelectron current;
• circuitry for indicating a condition of quality based on the generated sigal indicative of photoelectron current;
• and
• wherein the circuitry for indicating a condition of quality comprises circuitry for evaluating the generated signal indicative of photoelectron current to thereby discriminate between at least one of:
• surface contamination and corrosion;
• and
• different species of contaminates.

An apparatus for performing quality inspections on a test surface comprising:

• a multi-state device for producing optical radiation in the direction of the test surface, the optical radiation defining a particular spectrum line that corresponds to a particular state of the device wherein each state of the device effects generation of at least one particular spectrum line;
• circuitry for successively configuring the device into different states;
• additional circuitry for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron currents;
• and
• the indicating circuitry comprising an arrangement for evaluating the generated signal to thus distinguish between at least one of:
• surface contamination and corrosion;
• and
• different species of contaminants.

An apparatus for performing quality inspections on a test surface comprising:

• means for producing optical radiation having a continuum spectrum, selecting a band of at least one wavelength from the continuum, and directing the selected band to the test surface;
• means for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron current;
• and
• the means for indicating a condition of quality comprising means for distinguishing between at least one of:
• surface contamination;
• surface oxidation;
• and
• different species of contaminants.

An apparatus for performing quality inspections on a teat surface comprising:

• means for producing optical radiation having a continuum spectrum, selecting a band of at least one wavelength from the continuum, and directing the selected band to the test surface;
• means for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron current;
• and
• the means for producing optical radiation comprising a deuterium lamp.

An apparatus for perfuming quality inspections on a test surface comprising:

• means for producing optical radiation having a continuum spectrum, selecting a band of at least one wavelength from the continuum, and directing the selected band to the test surface;
• means for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron current;
• the selecting means comprising a filtering device that filters the optical radiation directed to the test surface;
• the filtering device comprising a plurality of filtering sections, each filtering section allowing at least one particular spectrum band to pass therethrough;
• a first one of the plurality of filtering sections allowing only a first spectrum band to pass therethrough, a second one of the filtering sections allowing only a second spectrum band to pass therethrough, and a third one of the plurality of filtering sections allowing only the first and second spectrum bands to pass therethrough;
• and
• the filtering device having a first state that enables only the first one of the filtering sections to filter the optical radiation, a second state that enables only the second one of the filtering section to filter the optical radiation, and a third state that enables only the third filtering section to filter the optical radiation.

An apparatus for performing quality inspections on a test surface comprising:

• means for producing optical radiation having a continuum spectrum, selecting a band of at least one wavelength from the continuum, and directing the selected band to the test surface;
• means for detecting a current of photoelectrons emitted from the test surface, generating a signal indicative of photoelectron current, and indicating a condition of quality based on the generated signal indicative of photoelectron current;
• the selecting means comprising a plurality of filtering device that filters the optical radiation directed to the test surface;
• the filtering device comprising a plurality of filtering sections, each filtering section allowing at least one particular band to pass therethrough;
• and
• each of the filtering sections comprising a dielectric filter.