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US 6,856,228 B2Granted
Integrated inductor
AssigneeIntel Corporation
InventorDonald S. Gardner
Life of this patent
Estimating the term…
Abstract
An inductor comprises a substrate comprising a semiconductor material, a first dielectric layer over the substrate, a magnetic layer over the first dielectric layer, a second dielectric layer over the magnetic layer, and a conductor over the second dielectric layer.
Claims4
An inductor comprising:
- a substrate comprising a semiconductor material;
- a first dielectric layer over the substrate;
- a first magnetic layer over the first dielectric layer including a slot having a first shape;
- a second dielectric layer over the first magnetic layer;
- a conductor over the second dielectric layer having a second shape, the first shape is independent of the second shape;
- a second magnetic layer over the conductor;
- and
- wherein the first and second magnetic layers comprise an amorphous alloy comprising cobalt, zirconium, and at least one element selected from the list of tantalum, niobium, and a rare earth element.
5 more elements
An inductor comprising:
- a substrate comprising a semiconductor material;
- a first dielectric layer over the substrate;
- a magnetic layer over the first dielectric layer;
- a second dielectric layer over the magnetic layer;
- and
- a conductor over the second dielectric layer, the conductor having a first shape;
- wherein the magnetic layer defines at least one slot, the slot having a second shape independent of the first shape of the conductor.
4 more elements
An inductor comprising:
- a substrate comprising a semiconductor material;
- a first dielectric layer over the substrate;
- a first magnetic layer over the first dielectric layer including a slot having a first shape;
- a second dielectric layer over the first magnetic layer;
- a conductor over the second dielectric layer having a second shape, the first shape is independent of the second shape;
- a third dielectric layer over the conductor;
- and
- a second magnetic layer over the third dielectric layer.
5 more elements
Dependencies are inferred from the claim text.