Photolithographically-patterned out-of-plane coil structures and method of making

A multi-turn coil structure, comprising:

• a substrate;
• and
• a plurality of elastic members, each elastic member comprising a first anchor portion, a loop winding and a second anchor portion, the first anchor portion being fixed to the substrate, the second anchor portion being connected to the same substrate, wherein the second anchor portion and the loop winding are initially fixed to the same substrate, but are released from the substrate to become separated from the substrate, and wherein an intrinsic stress profile in the elastic member biases the second anchor portion away from the substrate forming the loop winding and causing the second anchor portion to contact the same substrate;
• wherein the loop windings of the elastic members are disposed axially adjacent to one another and wherein the first anchor portion of one of the plurality of elastic members is connected to the second anchor portion of an adjacent one of the plurality of elastic members.

An out-of-plane coil structure, comprising:

• a substrate;
• and
• an elastic member comprising a first anchor portion, a loop winding and a second anchor portion, the first anchor portion being fixed to the substrate, the second anchor portion being connected to the same substrate;
• wherein the loop winding has an axis which is substantially parallel to the substrate.

An out-of-plane, multi-turn coil structure, comprising:

• a substrate;
• and
• a plurality of elastic members, each elastic member comprising a first anchor portion, a loop winding and a second anchor portion, the first anchor portion being fixed to the substrate, the second anchor portion being connected to the same substrate;
• wherein the loop winding has an axis which is substantially parallel to the substrate;
• wherein the loop windings of the elastic members are disposed axially adjacent to one another and wherein the first anchor portion of one of the plurality of elastic members is connected to the second anchor portion of an adjacent one of the plurality of elastic members.