Coaxial type impedance matching device
AssigneesNagano Japan Radio Co., Ltd., Tokyo Electron Limited
InventorsFumio Yamada, Toshiaki Kitamura, Hiroyuki Kobayashi, Koichi Rokuyama, Akihiro Kubota, Shigeru Kasai, Takashi Ogino, Yuki Osada
Life of this patent
Estimating the term…