Automatically adjustable wafer probe card
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSheng-Hui Liang, Chine-Gie Lou
Life of this patent
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Abstract
An automatically adjustable wafer probe card for the testing of integrated circuits fabricated on a wafer. The wafer probe card includes a pitch shift assembly having a shift block that includes a reserve needle block and an adjacent functional needle block. Multiple probe needles are linearly adjustable on the shift block, and a selected number of the probe needles can be shifted from the reserve needle block to the functional needle block depending on the number of contact pads on the integrated circuit to be contacted by the probe needles of the wafer probe card during the testing process. A selected spacing between the probe needles, or pitch, can be achieved by locating the probe needles at the selected spacings from each other along the functional needle block.
Claims17
A wafer probe card for use with a wafer testing system, comprising:
- a board;
- at least one elongated shift block carried by said board;
- and
- a plurality of probe needles adjustably carried by said at least one shift block for electrical connection to the wafer testing system and selective positional adjustment along said at least one shift block, said shift block comprises a reserve needle block and a functional needle block adjacent to said reserve needle block, and wherein said plurality of probe needles are capable of selective positional adjustment between said reserve needle block and said functional needle block.
A wafer probe card for use with a wafer testing system, comprising:
- a board;
- at least one elongated shift block carried by said board;
- a plurality of probe needles adjustably carried by said at least one shift block for electrical connection to the wafer testing system;
- and
- a control system operably connected to said plurality of probe needles for adjusting positions of selected ones of said plurality of probe needles along said at least one shift block.
A wafer probe card for use with a wafer testing system, comprising:
- a board;
- at least one elongated shift block having an elongated pitch shift track carried by said board;
- a plurality of probe needles adjustably carried by said at least one shift block for electrical connection to the wafer testing system and positional adjustment along said pitch shift track;
- and
- a control system operably connected to said plurality of probe needles for adjusting positions of selected ones of said plurality of probe needles along said pitch shift track.
Dependencies are inferred from the claim text.