System and method for measuring a capacitance of a conductor

A method for measuring a capacitance, the method comprising:

• selectively charging and discharging a first conductor with a first set of p and n element-pairs in response to a voltage potential applied to the first set of p and n element-pairs;
• selectively charging and discharging a second conductor with a second set of p and n element-pairs in response to a voltage potential applied to the second set of p and n element-pairs, wherein currents are measured at drains associated with the first set of p element-pairs as the first and second conductors charge and discharge such that a capacitance associated with the first conductor is determined based on the drain currents;
• and
• providing a calibration element for measuring the capacitance associated with the first conductor, the calibration element including a reference structure coupled to the first and second sets of p and n element-pairs.

A system for measuring a capacitance comprising:

• a device under test, the device under test including first, second and third conductors, the second and third conductors operable to be shorted together to provide a single pathway for electrical current;
• a first set of p and n element-pairs coupled to the first conductor and operable to selectively charge and discharge the first conductor in response to a voltage potential applied to the first set of p and n element-pairs;
• a second set of p and n element-pairs coupled to each of the second and the third conductor and operable to selectively charge and discharge the second and third conductors in response to a voltage potential applied to the second set of p and n element-pairs, wherein currents are measured at drains associated with the first set of p element-pairs as the conductors charge and discharge such that a capacitance associated with the first conductor is determined based on the drain currents;
• and
• a plate positioned proximate to the first, second, and third conductors and operable to be selectively grounded in order to provide a reference value for a capacitance measurement associated with the first conductor.