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US 6,856,078 B2Granted
Lamp filament design
AssigneeASM America, Inc.
InventorMichael W. Halpin
Life of this patent
Estimating the term…
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AssigneeASM America, Inc.
InventorMichael W. Halpin
Estimating the term…
An improved support is provided for locating a lamp filament axially within a lamp sleeve. The illustrated support is a spiral coil that includes a small diameter center portion that makes contact with the filament. On either side of the filament-contacting portion, the coil opens up to larger diameters for contacting the inner wall of the quartz sleeve within which the filament is housed. The support thus appears H-shaped when viewed from the side. A lamp filament is also provided with expansion compensation sections at either end of a central section. The filament wire in the compensation sections is wound into coils having a greater diameter and also a greater spacing between windings, as compared to coil in the central section. The expansion compensation sections are preferably capable of compressing and thereby absorbing thermal expansion of the filament during operation, without shorting the filament across adjacent windings.
A lamp having a filament support with at least two supporting portions connected to one another, wherein the filament support comprises two conical spirals joined at their apexes.
A lamp for a semiconductor processing apparatus, the lamp comprising a filament housed within a transparent sleeve, the filament comprising a central section formed by a wire coil and a pair of expansion compensation sections proximate lateral ends of the filament, the expansion compensation sections being more readily compressible than the coil of the central section without shorting and wherein each compensation section comprises a coil having a larger diameter than the coil of the central section.
A lamp for a semiconductor processing apparatus, the lame comprising a filament housed within a transparent sleeve, the filament comprising a central section formed by a wire coil and a pair of expansion compensation sections proximate lateral ends of the filament, the expansion compensation sections being more readily compressible than the coil of the central section without shorting and wherein the expansion compensation sections each comprise a coil having a larger spacing than the coil of the central section, wherein the coil of each of the expansion compensation sections has a diameter greater than about 1.5 times a diameter of the coil of the central section.
A lamp for a semiconductor processing apparatus, the lamp comprising a filament housed within a transparent sleeve, the filament comprising a central section formed by a wire coil and a pair of expansion compensation sections proximate lateral ends of the filament, the expansion compensation sections being more readily compressible than the coil of the central section without shorting and wherein the expansion compensation sections each comprise a coil having a larger spacing than the coil of the central section wherein the coil of each of the expansion compensation sections has a spacing between windings greater than about 1.5 times a spacing between windings of the coil of the central section.
A lamp for a semiconductor processing apparatus, the lamp comprising a filament housed within a transparent sleeve, the filament comprising a central section formed by a wire coil and a pair of expansion compensation sections proximate lateral ends of the filament, the expansion compensation sections being more readily compressible than the coil of the central section without shorting and wherein the expansion compensation sections each comprise a coil having a larger spacing than the coil of the central section, wherein each of the expansion compensation sections has a length less than one tenth a length of the central section, as measured along a filament axis.
Dependencies are inferred from the claim text.