Systems and methods for overcoming stiction
AssigneePTS Corporation
InventorsDavid Miller, Lilac Muller, Robert L. Anderson
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Abstract
A number of methods and systems for overcoming stiction are provided. The systems include electro-mechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moved to a desired location.
Claims28
An electo-mechanical system capable of overcoming stiction forces through localized vibration, the system comprising:
- a base layer having a surface;
- a device supported above the surface by a pivot, wherein the device is movable along a movement path;
- a stop located at a contact position along the movement path, wherein the device contacts the stop at the contact position, and wherein a stiction force between the device and the stop exits at the contact position;
- and
- a vibration element operable to cause a vibration at or near the contact position, the vibration element having a vibration actuator, wherein the vibration disrupts the stiction force.
Dependencies are inferred from the claim text.