Electronic device substrate structure and electronic device
AssigneeTDK Corporation
InventorsTakao Noguchi, Hisatoshi Saitou, Hidenori Abe, Yoshinari Yamashita
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AssigneeTDK Corporation
InventorsTakao Noguchi, Hisatoshi Saitou, Hidenori Abe, Yoshinari Yamashita
Estimating the term…
An electronic device substrate structure including a substrate 2, a metal thin film 4 as a (111)-oriented film of a face-centered cubic structure or as a (0001)-oriented film of a hexagonal closest packed structure formed on the substrate 2, and a wurtzite type thin film 5 as a (0001)-oriented film of a wurtzite crystal structure formed on the metal thin film 4, wherein: each of the two thin films is a polycrystalline film containing at least two kinds of crystal grains different in direction of crystal orientation in the plane; when the metal thin film 4 is a (111)-oriented film, <11-20> axes in the plane of the wurtzite type thin film 5 are parallel to <1-10> axes in the plane of the metal thin film 4; and when the metal thin film 4 is a (0001)-oriented film, <11-20> axes in the plane of the wurtzite type thin film 5 are parallel to <11-20> axes in the plane of the metal thin film 4.
An electronic device substrate structure comprising:
Dependencies are inferred from the claim text.