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US 6,855,945 B1Granted
Electrically conductive synthetic diamond apertures for electron and other particulate beam systems
OwnerStephen H. Silderinventor
Life of this patent
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Abstract
A thin flat disc with an orifice or orifices to size and control electron and other charged particulate beams. The disc is made of electrically conductive chemical vapor deposition (CVD) diamond. In addition the disc contains one or more high precision fine to ultra-fine orifices.
Claims9
An aperture for defining and controlling electron and other particulate charged beam devices wherein said aperture comprises a robust body material made of non-metallic electrically conductive synthetic material and said robust body of material is composed of boron doped, synthetic polycrystalline diamond of 2 mm or 3 mm diameter with parallel body faces.
Dependencies are inferred from the claim text.