US 6,855,940 B2 · Charged particle microscope

Abstract

In a charged particle microscope equipped with a sample stage having an inclination function, the invention provides a construction that prevents inclination driving of the sample stage from affecting other peripheral devices to be additionally installed such as an optical microscope. In the charged particle microscope according to the invention, a sample stage having an inclination mechanism includes a rotation support portion of the inclination mechanism on sidewalls of a vacuum chamber, and at least a detection portion of other peripheral devices additionally installed such as (1) an optical microscope, (2) a laser scattering microscope and (3) an optical height detection system is fitted to the rotation support portion inside the chamber in such a fashion as to be capable of moving with a rotary shaft of the inclination mechanism, and members that cannot be arranged in vacuum are installed outside the chamber.

Claims4

Dependent claims

A charged particle apparatus comprising:

a vacuum chamber;
a sample stage provided in the vacuum chamber for supporting a sample;
a charged particle beam source for irradiating a charged particle beam toward the sample stage;
an inclination mechanism provided in the vacuum chamber for varying an angle of inclination of the sample stage;
and a laser level meter comprising a laser projector and a laser reciever fitted to the vacuum chamber for indexing a reference height of a sample surface provided in the vacuum chamber and mounted to the inclination mechanism to undergo inclination movement therewith to maintain a constant position relative to the sample independent of an inclination angle of the sample stage.

2 more elements

Dependencies are inferred from the claim text.

Charged particle microscope

Life of this patent

Charged particle microscope

Life of this patent

Abstract

Claims4