Detector arrangement for energy measurement of pulsed x-ray radiation

Abstract

The invention is directed to a detector arrangement for energy measurement of pulsed x-ray radiation, particularly for monitoring the energy emitted by pulsed EUV radiation sources. The object of the invention, to find a novel possibility for energy measurement of high-energy x-ray radiation or EUV radiation which permits an accurate monitoring of the radiation dose over the entire life of the radiation source without continual calibration of the radiation detectors, is met according to the invention in that a closed vessel is provided which has an inlet opening for the radiation to be detected, is filled with a suitable gas under defined pressure for absorbing the radiation and has a linear extension, at least in the direction of incidence of the radiation, which is adapted to the absorption behavior of the gas so that the radiation to be detected is absorbed before it can reach a wall of the vessel, and at least one pressure sensor is arranged in the vessel for measuring a pressure wave generated due to the local temperature change occurring as a result of temporary intensive radiation absorption.

Dependencies are inferred from the claim text.