Coated doped oxides
AssigneeDegussa AG
InventorsKai Schumacher, Helmut Mangold
Life of this patent
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Abstract
Oxide particles with a doping component distributed in the core and a shell surrounding the core, which can be prepared by first introducing the doping into the core of a metal oxide or metalloid oxide via an aerosol in a pyrogenic process, subsequently coating the doped core with a salt solution of a metal or metalloid, drying it and optionally calcining it; which particles can be employed for chemical-mechanical polishing.
Claims21
Oxide particles comprising an oxide core, an oxide doping component distributed in the core, thus forming a doped core, and an oxide shell surrounding the doped core, wherein the core, the doping component and the shell are different phases each having a different chemical composition.
A method comprising chemical-mechanical polishing of a semiconductor substrate or of a layer applied thereto with oxide particles comprising a core, a doping component distributed in the core, thus forming a doped core, and a shell surrounding the doped core, wherein the core, the doping component and the shell each have a different chemical composition.
Oxide particles, comprising a shell covering aggregates of doped core particles, wherein
- each doped core particle comprises
- a core, and
- a doping component distributed in the core;
- and
- the core, the doping component and the shell each have a different chemical composition.
Dependencies are inferred from the claim text.