Semiconductor device with elevated source/drain structure and its manufacture method

A method of manufacturing a semiconductor device, comprising steps of:

• (a) forming a gate insulating film and a gate electrode disposed on the gate insulating film, over a partial surface of a semiconductor substrate;
• (b) forming first sidewall spacers on sidewalls of the gate electrode;
• (c) growing first semiconductor films made of semiconductor material over surfaces of the semiconductor substrate not covered with the gate electrode and the first sidewall spacers;
• (d) removing the first sidewall spacers;
• (e) implanting impurities of a first conductivity type into a surface layer of the semiconductor substrate and surface layers of the first semiconductor films, by using the gate electrode as a mask;
• (f) forming second sidewall spacers on the sidewalls of the gate electrode, the second sidewall spacers reaching at least edges of the first semiconductor films on the gate electrode side;
• (g) implanting impurities of the first conductivity type into regions of the first semiconductor films not covered with the second side wall spacers;
• and
• (h) executing heat treatment for activating the impurities implanted at the steps (e) and (g).