Method and device for surface-treating substrates
AssigneeFraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
InventorsThomas Jung, Claus-Peter Klages
Life of this patent
Estimating the term…
Abstract
A method for surface treatment of at least one electrically conducting substrate or a substrate that has been coated so as to be conducting (1) by means of a gas placed in the region of an electric discharge (2). The discharge region is restricted by at least two essentially opposite sides of the substrate surface to be treated (7). This process is especially suitable for treating band-shaped and continuously supplied substrates.
Claims31
A process for coating of at least one electrically conducting substrate or a substrate that has been coated so as to be electrically conducting, the process comprising the steps of:
- placing a gas in a region of an electric discharge;
- restricting the discharge region on at least two opposite sides by surfaces to be coated, wherein the surfaces to be coated are supplied by one of two flat, parallel substrates and at least one continuously moving band-shaped substrate and wherein the surfaces to be coated form a hollow cathode used to enable a hollow-cathode glow discharge;
- and
- coating the surfaces to be coated by a hollow-cathode glow discharge, said discharge activated only by at least one of a DC voltage, a pulsed DC voltage, and an AC voltage having a frequency of up to 50 MHz.
A device for coating of at least one electrically conducting substrate or a substrate that has been coated so as to be electrically conducting, the device comprising:
- a discharge region enclosed on at least two sides by substrate surfaces of at least one substrate to be coated;
- means for supplying electrical energy to the discharge region;
- a vacuum chamber to enclose the discharge region;
- means for supplying gas to the vacuum chamber;
- means for removing gas from the vacuum chamber;
- and
- an anode proximate to the at least one substrate and the anode operable to receive an activating voltage;
- wherein the substrate surfaces form a hollow cathode used to enable a hollow-cathode glow discharge, and wherein the at least one substrate is surface coated by the hollow-cathode glow discharge, said discharge activated by the activating voltage, the activating voltage being only at least one of a DC voltage, a pulsed DC voltage, and an AC voltage having a frequency of up to 50 MHz and wherein the substrate surfaces are supplied by one of two flat parallel substrates and at least one continuously moving band-shaped substrate.
A process for coating of a substrate, the substrate being one of an electrically conducting substrate and a substrate coated so as to be electrically conducting, the process comprising the steps of:
- placing a gas in a region of an electric discharge;
- restricting the discharge region on at least two sides by substrate surfaces to be coated, wherein the substrate surfaces form a below cathode;
- and
- coating the substrate surfaces by a hollow-cathode glow discharge, said discharge activated by at least one of a DC voltage, a pulsed DC voltage, an AC voltage and microwaves;
- and wherein
- elements of the surface treatment process are integrated outside of the discharge region, the elements including means for placing the gas in the region and means or removing the gas from the region.
A device for coating of a substrate, the substrate being one of an electrically conducting substrate and a substrate coated so as to be electrically conducting, the device comprising:
- at least one substrate defining a discharge region enclosed on at least two sides by substrate surfaces to be coated;
- means for supplying electrical energy to the discharge region;
- a vacuum chamber to enclose the discharge region;
- means for supplying gas to the vacuum chamber;
- means for removing gas from the vacuum chamber;
- and
- an anode proximate to the at least one substrate;
- wherein the substrate surfaces from a hollow cathode, and wherein the substrate surfaces are coated by a hollow-cathode glow discharge activated by at least one of a DC voltage, a pulsed DC voltage, an AC voltage and microwaves;
- and
- wherein elements of said device are integrated outside of the discharge region, the elements including the means for supplying gas, the means for removing gas the anode.
Dependencies are inferred from the claim text.