Components for vacuum deposition apparatus and vacuum deposition apparatus therewith, and target apparatus

A target apparatus, comprising:

• a target body;
• and
• a spray deposit coated on a non-erosion area of the target body and having surface roughness in which a mean spacing S of tops of local peak of profile is in a range from 50 to 150 μm, a distance from a mean line to a bottom of profile valley line Rv is in a range from 20 to 70 μm, and a distance from a mean line to a top of profile peak line Rp is in a range from 20 to 70 μm, wherein a difference in distance between the top of profile peak line Rp and the bottom of profile valley line Rv (Rp-Rv) is in a range from −11 to 6 μm so that a film adhered on the surface of the spray deposit grows with a stable columnar structure.

A target apparatus, comprising:

• a target;
• and
• a backing plate comprising a backing plate body holding the target, and a spray deposit coated on a surface of the backing plate body and having surface roughness in which a mean spacing S of tops of local peak of profile is in a range from 50 to 150 μm, a distance from a mean line to a bottom of profile valley line Rv is in a range from 20 to 70 μm, and a distance from a mean line to a top of profile peak line Rp is in a range from 20 to 70 μm, wherein a difference in distance between the top of profile peak line Rp and the bottom of profile valley line Rv (Rp-Rv) is in a range from −11 to 6 μm so that a film adhered on the surface of the spray deposit grows with a stable columnar structure.