Turbo-molecular pump
AssigneeBOC Edwards Technologies Limited
InventorsTooru Miwata, Satoshi Okudera, Yoshiyuki Sakaguchi, Yasushi Maejima
Life of this patent
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Abstract
A turbo-molecular pump has a main body and a pump case for covering the main body. A first flange is integrally formed with the pump case for connection to a second flange integrally with a vacuum chamber. The flange of the pump case and the flange of the vacuum chamber are integrally connected together with fastening bolts. A clamping structure separately clamps the first and second flanges together by surrounding a portion of each of the first and second flanges.
Claims20
A turbo-molecular pump comprising:
- a main body;
- a pump case for covering the main body;
- a first flange integrally formed with the pump case for connection to a second flange integrally formed with a vacuum chamber;
- a plurality of fastening bolts for fastening the first flange to the second flange;
- and
- clamping means for clamping the first and second flanges together by surrounding a portion of each of the first and second flanges.
In combination:
- a turbo-molecular pump having a first flange;
- a vacuum chamber having a second flange;
- connecting means for integrally connecting the first flange to the second flange;
- and
- clamping means for clamping the first and second flanges together.
An apparatus for connecting a turbo-molecular pump to a vacuum chamber, the apparatus comprising:
- a plurality of first connecting members for connecting a flange of the turbo-molecular pump to a flange of the vacuum chamber;
- at least one first clamping member configured to engage with a surface of the flange of the turbo-molecular pump;
- at least one second clamping member configured to engage with a surface of the flange of the vacuum chamber;
- and
- a plurality of second connecting members for connecting the first and second clamping members together when the first and second clamping members engage the surfaces of the respective flanges of the turbo-molecular pump and the vacuum chamber to thereby clamp the flanges together.
Dependencies are inferred from the claim text.