Laminate having mono-crystal oxide conductive member on silicon substrate, actuator using such laminate, ink jet head and method for manufacturing such head
AssigneeCanon Kabushiki Kaisha
InventorTakanori Matsuda
Life of this patent
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Abstract
In a mono-crystal oxide conductive member on a silicon substrate, including an electrode material of a perovskite type piezoelectric element and an electrostrictive material and an oxide conductive material as a film formation substrate, a distance x between silicon atoms and a distance y between atoms of the mono-crystal oxide conductive member satisfy the following relationship: Z = my nx - 1 min ≧ 0.05 (n and m are given positive integers, 1≦n≦5, 1≦m≦7 and nx≦3, my≦3).
Claims13
A laminate having a mono-crystal oxide conductive member on a silicon substrate, wherein a distance x between silicon atoms and a distance y between atoms of said mono-crystal oxide conductive member satisfy the following relationship:
- Z
- =
-
- my
- nx
- -
- 1
-
- min
- ≧
- 0.05
- (n and m are given positive integers, 1≦n≦5, 1≦m≦7 and nx≦3, my≦3)
- where x is the distance between any two silicon atoms exposed on a surface of said silicon substrate confronting said mono-crystal oxide conductive member and nx is a value no more than 3 nm, and y is the distance between any two atoms constituting said mono-crystal oxide conductive member and exposed on a surface of said mono-crystal oxide conductive member confronting the silicon and my is a value no more than 3 nm.
A method for manufacturing a laminate having a mono-crystal oxide conductive member on a silicon substrate, comprising the steps of:
- providing said mono-crystal oxide conductive member on a mono-crystal substrate;
- joining said mono-crystal oxide conductive member to said silicon substrate;
- and
- removing said mono-crystal substrate from said mono-crystal oxide conductive member.
A method for manufacturing an ink jet head having a mono-crystal oxide conductive member on a silicon substrate and having a perovskite type piezoelectric material and/or an electrostrictive material on said mono-crystal oxide conductive member and having an upper electrode on said perovskite type piezoelectric material and/or said electrostrictive material and including a nozzle plate provided with a discharge port, a pressure chamber communicated with said discharge port and an ink supply path communicated with said pressure chamber, comprising the steps of:
- providing said mono-crystal oxide conductive member on a mono-crystal substrate;
- joining said mono-crystal oxide conductive member to said silicon substrate;
- removing said mono-crystal substrate from said mono-crystal oxide conductive member;
- providing said perovskite type piezoelectric material and/or said electrostrictive material on said mono-crystal oxide conductive member;
- providing said upper electrode on said perovskite type piezoelectric material and/or said electrostrictive material;
- forming said pressure chamber and said ink supply path;
- and
- joining said nozzle plate in which said discharge port is formed to said pressure chamber.
A method for manufacturing an actuator having a mono-crystal oxide conductive member on a silicon substrate and having a perovskite type piezoelectric material and/or an electrostrictive material on said mono-crystal oxide conductive member and having an upper electrode on said perovskite type piezoelectric material and/or said electrostrictive material, comprising the steps of:
- providing said mono-crystal oxide conductive member on a mono-crystal substrate;
- joining said mono-crystal oxide conductive member to said silicon substrate;
- removing said mono-crystal substrate from said mono-crystal oxide conductive member;
- providing said perovskite type piezoelectric material and/or said electrostrictive material on said mono-crystal oxide conductive member;
- and
- providing said upper electrode on said perovskite type piezoelectric material and/or said electrostrictive material.
Dependencies are inferred from the claim text.