Embedded piezoelectric microcantilever sensors

An array of embedded microcantilevers for detecting analytes, comprising:

• a plurality of discrete solid-phase sensing material deposits formed on a surface;
• a corresponding plurality of deflectable arms, each having one end fixedly coupled to a substrate and an overhang portion at least partially embedded within a corresponding one of said solid-phase sensing material deposits, wherein each of the solid-phase sensing material deposits is capable of producing a volumetric change based on the contact of at least one analyte with the solid-phase sensing material, and each deflectable arm being capable of deflecting responsive to a volumetric change in said corresponding solid-phase sensing material deposit;
• and
• detecting means capable of measuring the deflection of each deflectable arm.

A method for detecting an analyte within a medium, comprising:

• providing a deflectable microcantilever arm having a first end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;
• forming a solid-phase sensing material deposit adjacent to said arm and at least partially embedding a second end of said arm into said solid-phase sensing material deposit, said solid-phase sensing material deposit capable of at least one of vertical swelling and vertical contraction responsive to the contact of said analyte with said solid-phase sensing material deposit, said vertical swelling causing said microcantilever arm upward deflection and said vertical contraction causing said microcantilever arm downward deflection;
• introducing a medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor;
• and
• measuring said deflection of said microcantilever arm.

A method for detecting an analyte within a medium, comprising:

• providing a deflectable microcantilever arm having a first end fixedly coupled to a substrate, said microcantilever arm disposed in a rest position;
• forming a sensing material deposit compositionally different from said at least one analyte adjacent to said arm and at least partially embedding a second end of said arm into said sensing material deposit, said at least one analyte and said sensing material deposit being capable of at least one of vertical swelling and vertical contraction responsive to the contact of said analyte with said sensing material deposit, said vertical swelling causing said microcantilever arm upward deflection and said vertical contraction causing said microcantilever arm downward deflection;
• introducing a medium containing said analyte to said sensing element, said medium being one of a liquid and a vapor;
• and
• measuring said deflection of said microcantilever arm.