Replication and transfer of microstructures and nanostructures
AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorCharles Daniel Schaper
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AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorCharles Daniel Schaper
Estimating the term…
A method for the duplication of microscopic patterns from a master to a substrate is disclosed, in which a replica of a topographic structure on a master is formed and transferred when needed onto a receiving substrate using one of a variety of printing or imprint techniques, and then dissolved. Additional processing steps can also be carried out using the replica before transfer, including the formation of nanostructures, microdevices, or portions thereof. These structures are then also transferred onto the substrate when the replica is transferred, and remain on the substrate when the replica is dissolved. This is a technique that can be applied as a complementary process or a replacement for various lithographic processing steps in the fabrication of integrated circuits and other microdevices.
A method for pattern formation comprising:
A method for forming a pattern on a substrate, comprising:
A method for forming a patterned layer of material on a substrate, comprising
Dependencies are inferred from the claim text.