Microelectromechanical RF and microwave frequency power regulator

A power regulator including:

• a. a substrate having a side with at least one ground contact of an electrically conductive material formed thereon, and a substantially planar transmission line of an electrically conductive material formed thereon;
• b. a substantially elongated strip of electrically conductive material electrically and mechanically connected to the at least one ground contact and positioned so that a portion of the substantially elongated strip is adjacent to the substantially planar transmission line and so that a gap is formed therebetween, such that when an undesirable signal is present in the substantially planar transmission line, a resultant force is created, causing the substantially elongated strip to flex toward the transmission line, physically and electrically contacting the transmission line and thus diverting the undesirable signal to ground by passing the signal through the substantially elongated strip to the at least one ground contact;
• and
• c. further including a plurality of power regulators.

A power regulator including:

• a. a substrate having a side with at least one ground contact of an electrically conductive material formed thereon, a substantially planar transmission line of an electrically conductive material formed thereon, and an actuator pad formed thereon;
• b. a substantially elongated strip of material including at least one layer of electrically conductive material, said elongated strip of material formed as a cantilever arm having a first end and a second end, with the first end mechanically attached to the substrate with the electrically conductive material electrically connected to the at least one ground contact, and the second end of the cantilever arm including an electrically conductive contact pad formed on the at least one layer of electrically conductive material and positioned adjacent to the substantially planar transmission line so that a gap is formed therebetween;
• and
• c. the cantilever arm further including an insulating layer formed such that it resides between the first end and the second end, and resides adjacent to the actuator pad on the substrate, such that when a signal is passed to the actuator pad, the electrically conductive contact pad is forced into contact with the substantially planar transmission line and such that the insulating layer on the cantilever arm provides means to maintain a force sufficient to maintain the contact during the application of a bias to the actuation pad.