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US 6,841,922 B2Granted
Piezoelectric resonator apparatus with acoustic reflector
AssigneeInfineon Technologies AG
InventorsRobert Aigner, Lueder Elbrecht, Stephan Marksteiner, Hans-Joerg Timme
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Abstract
A resonator apparatus has a piezoelectric resonator as well as an acoustic reflector which has a layer having a high acoustic impedance and a layer having a low acoustic impedance. The thickness of one layer is set different from a quarter of the wavelength in this layer at the operating frequency due to technological limitations in the manufacturing of this layer, and the thickness of the other layer is set dependent from the one layer, such that a predetermined minimum quality of the acoustic reflector is attained.
Claims9
A resonator apparatus comprising
- a piezoelectric resonator;
- and
- an acoustic reflector comprising a sequence of stacked layers having alternating low and high acoustic impedance;
- wherein the thickness of one layer is set different from a quarter of the acoustic wavelength in this layer at the operating frequency due to technological limitations in the manufacturing of this layer, and
- wherein the thickness of the other layer is set dependent from the one layer, such that a predetermined minimum quality of the acoustic reflector is attained,
- wherein the thickness of the one layer is decreased relative to the quarter of the wavelength, and wherein the thickness of the other layer is increased relative to the quarter of the wavelength.
3 more elements
Dependencies are inferred from the claim text.