Transmission electron microscope sample preparation
AssigneesAscend Instruments, LLC, Sciperio, Inc
InventorsJoseph Robinson, Kenneth H. Church
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Abstract
Sample preparation apparatus and method includes a wafer stage platform with an optical microscope and integrated pattern recognition to automatically address specific locations on the wafer sample of interest. A laser attaches to the optical microscope to mill a set pattern around the area of interest. A precision micro-manipulator engages the sample support structure, extracts the structure, and places the structure in a TEM holder or holder tip. The holder or holder tip can then be placed inside a FIB for final thinning, followed by direct transfer into the TEM.
Claims17
A sample preparation method comprising providing a sample wafer of interest on a support, cutting and extracting a desired nano-level portion from the wafer with a laser, holding and protecting the portion with a holder, placing the portion inside a focused ion beam source, thinning an area of interest on the portion with the focused ion beam source, and transferring the portion with the area of interest to a transmission electron microscope and analyzing the portion with the transmission electron microscope.
Dependencies are inferred from the claim text.