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US 6,841,096 B2Granted
Microfabricated lenses, methods of manufacture thereof, and applications therefor
AssigneeCalifornia Institute of Technology
InventorsStephen R. Quake, Yann Gambin
Life of this patent
Estimating the term…
Abstract
Microfabricated lenses, e.g., solid immersion lens (SIL) structures, are provided along with techniques for constructing these lens structures, as well as selected applications of such lens structures.
Claims15
A method for constructing a solid immersion lens structure, the method comprising:
- (a) producing a mold so as to define a pliant lens cavity in which a spherical solid immersion lens portion of the solid immersion lens structure is to be formed, the pliant lens cavity having an orifice having a transverse dimension less than a transverse dimension of the lens cavity for the spherical solid immersion lens portion, wherein the surface tension of the material from which the mold is formed is controlled so that the pliant lens cavity has a predetermined depth;
- (b) casting a moldable material, from which at least the solid immersion lens portion is to be formed, into at least the lens cavity;
- (c) permitting the moldable material to set thereby to form the solid immersion lens portion of the solid immersion lens structure;
- and
- (d) removing the solid immersion lens portion of the solid immersion lens structure from the pliant mold after the moldable material has set.
2 more elements
A method for constructing a solid immersion lens structure, the method comprising:
- (a) producing a mold so as to define a pliant lens cavity in which a spherical solid immersion lens portion of the solid immersion lens structure is to be formed, the pliant lens cavity having an orifice having a transverse dimension less than a transverse dimension of the lens cavity for the spherical solid immersion lens portion;
- wherein the mold producing step comprises casting a first catalyzed crosslinkable liquid around a mold core in the form of a generally spherical element, the surface tension of the first catalyzed crosslinkable liquid being controlled by a pre-curing process so that the first catalyzed crosslinkable liquid is cast to a height h around the mold core prior to it setting as the mold, thereafter removing mold core from the mold after the first catalyzed crosslinkable has set wherein a region of the mold adjacent the orifice is allowed to temporarily deform thereby to permit the spherical element to be removed with minimal damage to the mold;
- (b) thereafter casting a second catalyzed crosslinkable liquid into the mold until it has set;
- and then
- (c) removing the solid immersion lens portion from the mold after the second catalyzed crosslinkable liquid has set wherein the region of the mold adjacent the orifice is allowed to temporarily deform thereby to permit the solid immersion lens portion to be removed.
2 more elements
A method for constructing a solid immersion lens structure, the method comprising:
- producing a mold so as to define a pliant lens cavity in which a spherical solid immersion lens portion of the solid immersion lens structure is to be formed, the pliant lens cavity having an orifice having a transverse dimension of the lens cavity for the solid immersion lens;
- wherein the mold producing step comprises casting a first moldable material into a container to form a first layer from which the mold is to be formed and permitting the first layer to set, then positioning a mold core on the first layer, and then casting the first moldable material into the container to at least partially encapsulate the mold core and assume a circumferential wall height h around the mold core, thereby forming a second layer immediately adjacent the first layer, the first moldable material that forms the second layer being pre-cured prior to being cast around the mold core so as to reduce surface tension characteristics of the first moldable material such that the first moldable material assumes height h around the mold core.
A method for constructing a lens of a meniscus type, the method comprising:
- (a) producing a mold so as to define a pliant lens cavity in which a lens portion of the meniscus type lens is to be formed and casting the lens portion of the meniscus lens therefrom;
- (b) wherein the mold producing step comprises:
- (c) casting a first moldable material into a container to form a first layer from which the mold is to be formed;
- (d) positioning a mold core on the first layer prior to the first layer setting so that the first moldable material at least partially encapsulates the mold core;
- (e) casting a second moldable material into the container, thereby forming a second layer immediately adjacent the first layer, the second layer at least partially encapsulating a top portion of the mold core so as to define a first lens cavity in the second layer once the second moldable material sets, the first lens cavity at least partially defining the pliant lens cavity;
- and
- (f) removing the second layer from the first layer and then positioning a spacer layer having a predetermined thickness on the first layer, the spacer layer having an opening formed therein for receiving the mold core and a peripheral area of the first layer surrounding the mold core, the spacer layer being formed of a third moldable material.
4 more elements
Dependencies are inferred from the claim text.